![](/img/cover-not-exists.png)
[IEEE 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Vancouver, BC, Canada (2015.8.26-2015.8.28)] 2015 IEEE 12th International Conference on Group IV Photonics (GFP) - Ultra-fme Si photonics fabrication technology based on 40-nm-node CMOS process
Horikawa, Tsuyoslii, Mogami, TohruYear:
2015
Language:
english
DOI:
10.1109/group4.2015.7305906
File:
PDF, 4.33 MB
english, 2015