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[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - XTEM study of Ni gettering to H-implantation-induced nanocavities in SIMOX
Miao Zhang,, Weili Liu,, Xinzhong Duo,, Zhenghua An,, Chenglu Lin,, Chu, P.K., Scholz, R.Year:
2000
Language:
english
DOI:
10.1109/iit.2000.924144
File:
PDF, 300 KB
english, 2000