[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - Monte Carlo simulation and modeling of ion implantation induced contamination profiles
Haublein, V., Weiss, R., Frey, L., Ryssel, H.Year:
2000
Language:
english
DOI:
10.1109/iit.2000.924247
File:
PDF, 404 KB
english, 2000