[IEEE 14th International Vacuum Microelectronics Conference - Davis, CA, USA (12-16 Aug. 2001)] IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586) - New method for nondestructive internal microtomography of IC and vacuum microelectronic devices
Yawen Li,, Zhuguan Liang,, Ling Xiao,, Ling Wang,, Kaiun Zhou,, Ping Li,, Xiaohua Xu,, Rau, E.I., Wenguo Hu,Year:
2001
Language:
english
DOI:
10.1109/ivmc.2001.939630
File:
PDF, 220 KB
english, 2001