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[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Frequency and transient analysis of micromachined u-shaped cantilever devices for magnetic field measurement
Keplinger, F., Beigelbeck, R., KohI, F., Kvasnica, S., Jachimowicz, A., Jakob, B.Volume:
1
Year:
2005
Language:
english
DOI:
10.1109/sensor.2005.1496496
File:
PDF, 978 KB
english, 2005