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[IEEE IEEE Ultrasonics Symposium, 2005. - Rotterdam, The Netherlands (18-21 Sept. 2005)] IEEE Ultrasonics Symposium, 2005. - Low noise silicon micromechanical bulk acoustic wave oscillator
Kaajakari, V., Rantakari, P., Koskinen, J.K., Mattila, T., Kiihamaki, J., Koskenvuori, M., Tittonen, I., Oja, A.Volume:
2
Year:
2005
Language:
english
DOI:
10.1109/ultsym.2005.1603091
File:
PDF, 526 KB
english, 2005