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Two approaches for realizing traceability in nanoscale dimensional metrology
Dai, Gaoliang, Koenders, Ludger, Fluegge, Jens, Bosse, HaraldVolume:
55
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.oe.55.9.091407
Date:
March, 2016
File:
PDF, 3.27 MB
english, 2016