![](/img/cover-not-exists.png)
Thermal Shields for Heat Loss Reduction in Siemens-Type CVD Reactors
Ramos, A., Valdehita, J., Zamorano, J. C., Cañizo, C. delVolume:
5
Year:
2016
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0171603jss
File:
PDF, 1.04 MB
english, 2016