Investigations on MgO-dielectric GaN/AlGaN/GaN MOS-HEMTs by...

Semiconductor Science and Technology 2016 / 05 Vol. 31; Iss. 5

Investigations on MgO-dielectric GaN/AlGaN/GaN MOS-HEMTs by using an ultrasonic spray pyrolysis deposition technique

Lee, Ching-Sung, Hsu, Wei-Chou, Liu, Han-Yin, Wu, Ting-Ting, Sun, Wen-Ching, Wei, Sung-Yen, Yu, Sheng-Min
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Volume:
31
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/31/5/055012
Date:
May, 2016
File:
PDF, 1.34 MB
english, 2016
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