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Thin Solid Films 2016 / 4

Surface passivation property of aluminum oxide thin film on silicon substrate by liquid phase deposition

Lin, Che-Chun, Huang, Jung-Jie, Wuu, Dong-Sing, Chen, Chao-Nan
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.04.011
Date:
April, 2016
File:
PDF, 949 KB
english, 2016
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