Calibration Improvement for Piezoresistive Coefficients of...

Physica Scripta 2004 / 01 Vol. T114

Calibration Improvement for Piezoresistive Coefficients of Stress Sensors on (100) Silicon

Song, Weixia, Ristolainen, Eero
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
T114
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2004/t114/052
Date:
January, 2004
File:
PDF, 210 KB
english, 2004
Conversion to is in progress
Conversion to is failed