Deposition and qualification of tungsten coatings produced...

Physica Scripta 2011 / 12 Vol. T145

Deposition and qualification of tungsten coatings produced by plasma deposition in WF 6 precursor gas

Philipps, V, Kogut, D, Esser, H G, Sergienko, G, Zlobinski, M, Coenen, J W, Brezinsek, S, Nachtrodt, F, Sanyasi, A K
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Volume:
T145
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2011/t145/014030
Date:
December, 2011
File:
PDF, 2.30 MB
english, 2011
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