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Cyclic deformation and nano-contact adhesion of MEMS nano-bridges by in-situ TEM nanomechanical testing
Lockwood, A J, Bobji, M S, Bunyan, R J T, Inkson, B JVolume:
241
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/241/1/012056
Date:
July, 2010
File:
PDF, 500 KB
english, 2010