In-situ monitoring of gas-assisted focused ion beam and...

Journal of Physics Conference Series 2010 / 07 Vol. 241

In-situ monitoring of gas-assisted focused ion beam and focused electron beam induced processing

Utke, I, Gabureac, M, Friedli, V, Bernau, L, Michler, J
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Volume:
241
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/241/1/012072
Date:
July, 2010
File:
PDF, 2.11 MB
english, 2010
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