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Comparison of pull‐in voltages in MEMS using 3D FEM and analytical approaches
Dular, Patrick, Bölöni, Francisc, Benabou, Abdelkader, Tounzi, AbdelmounaïmVolume:
29
Language:
english
Journal:
COMPEL - The international journal for computation and mathematics in electrical and electronic engineering
DOI:
10.1108/03321641011078715
Date:
November, 2010
File:
PDF, 200 KB
english, 2010