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Semiconductor detectors of backscattered electrons in a scanning electron microscope: Characteristics and applications
Zaitsev, S. V., Kupreenko, S. Yu., Rau, E. I., Tatarintsev, A. A.Volume:
58
Language:
english
Journal:
Instruments and Experimental Techniques
DOI:
10.1134/S0020441215060123
Date:
November, 2015
File:
PDF, 862 KB
english, 2015