Controlling the duty cycle of holographic crossed gratings...

Applied Optics 2016 / 04 Vol. 55; Iss. 10

Controlling the duty cycle of holographic crossed gratings by in situ endpoint detection during development

Wang, Shiwei, Zeng, Lijiang
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Volume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.002657
Date:
April, 2016
File:
PDF, 803 KB
english, 2016
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