Microstructure and Nano-wear Property of Si-doped Diamond-like Carbon Films Deposited by a Hybrid Sputtering System
Zhang, T.F., Pu, J.J., Xia, Q.X., Son, M.J., Kim, K.H.Volume:
3
Year:
2016
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2016.02.032
File:
PDF, 413 KB
english, 2016