“Sketch and Peel” Lithography for High-Resolution Multiscale Patterning
Chen, Yiqin, Xiang, Quan, Li, Zhiqin, Wang, Yasi, Meng, Yuhan, Duan, HuigaoLanguage:
english
Journal:
Nano Letters
DOI:
10.1021/acs.nanolett.6b00788
Date:
April, 2016
File:
PDF, 1.46 MB
english, 2016