Formation of shallow source/drain junctions in MOSFET...

Physica Scripta 2006 / 09 Vol. T126

Formation of shallow source/drain junctions in MOSFET structures by using Cl-based processes in reduced pressure CVD reactors

Radamson, H H, Hållstedt, J, Isheden, C, Östling, M
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Volume:
T126
Language:
english
Journal:
Physica Scripta
DOI:
10.1088/0031-8949/2006/t126/022
Date:
September, 2006
File:
PDF, 327 KB
english, 2006
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