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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Optical Micro- and Nanometrology V - Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry
Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang, Endres, J., Kumar, N., Petrik, P., Henn, M. -., Heidenreich, S., Pereira, S. F., Urbach, H. P., Bodermann, B.Volume:
9132
Year:
2014
Language:
english
DOI:
10.1117/12.2052819
File:
PDF, 602 KB
english, 2014