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Infrared dielectric properties of low-stress silicon oxide
Cataldo, Giuseppe, Wollack, Edward J., Brown, Ari D., Miller, Kevin H.Volume:
41
Language:
english
Journal:
Optics Letters
DOI:
10.1364/OL.41.001364
Date:
April, 2016
File:
PDF, 1.50 MB
english, 2016