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Crystallization of amorphous silicon films via electron beam exposure
Moon, Byeong-Yeon, Kang, Jung Su, Park, Seon Yong, Park, Kyu ChangVolume:
16
Language:
english
Journal:
Journal of Information Display
DOI:
10.1080/15980316.2015.1070207
Date:
July, 2015
File:
PDF, 1.10 MB
english, 2015