Simultaneous position and angular error measurement of precision positioning stages using miniature interferometer with step-size variation
Dutta, Samik, Pati, Chinmoy, Sen, RanjanVolume:
4
Year:
2014
Language:
english
Journal:
International Journal of Precision Technology
DOI:
10.1504/ijptech.2014.060617
File:
PDF, 1.23 MB
english, 2014