Influence of Oxygen Flow Rate on the Characteristics of the...

Influence of Oxygen Flow Rate on the Characteristics of the Tungsten Oxide Using RF Magnetron Sputtering

Abdullah, S.A., Nafarizal, Nayan, Sahdan, Mohd Zainizan
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Volume:
773-774
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/amm.773-774.657
Date:
July, 2015
File:
PDF, 379 KB
english, 2015
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