Substrate Heating Effect on c-Axis Texture and Piezoelectric Properties of AlN Thin Films Deposited by Unbalanced Magnetron Sputtering
Hasheminiasari, Masood, Lin, JianliangVolume:
68
Language:
english
Journal:
JOM
DOI:
10.1007/s11837-016-1893-2
Date:
June, 2016
File:
PDF, 619 KB
english, 2016