Design of piezoelectric micromachined ultrasonic transducers (pMUTs) for high pressure output
Wang, Mingjun, Zhou, YufengVolume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2929-9
Date:
June, 2017
File:
PDF, 1.74 MB
english, 2017