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SPIE Proceedings [SPIE SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring - Las Vegas, Nevada, United States (Sunday 20 March 2016)] Electroactive Polymer Actuators and Devices (EAPAD) 2016 - Switchable adhesion for wafer-handling based on dielectric elastomer stack transducers
Bar-Cohen, Yoseph, Vidal, Frédéric, Grotepaß, T., Butz, J., Förster-Zügel, F., Schlaak, H. F.Volume:
9798
Year:
2016
Language:
english
DOI:
10.1117/12.2220771
File:
PDF, 592 KB
english, 2016