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SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - Deposition of PZT thin films by pulsed laser ablation for MEMS application
Maeda, Ryutaro, Kikuchi, Kaoru M., Schroth, Andreas, Umezawa, Akihiko, Matsumoto, Sohei, Hariz, Alex, Varadan, Vijay K., Reinhold, OlafVolume:
3242
Year:
1997
Language:
english
DOI:
10.1117/12.293559
File:
PDF, 467 KB
english, 1997