Electrochemically assisted PCD tool surface conditioning technique for silicon micromachining
Katahira, Kazutoshi, Nakamoto, Kazuo, Yamazaki, Kazuo, Ohmori, HitoshiVolume:
10
Year:
2014
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/ijnm.2014.059009
File:
PDF, 1.56 MB
english, 2014