Yield improvement via minimisation of step height non-uniformity in chemical mechanical planarisation (CMP) with pressure and velocity as control variables
Kadavasal, Muthukkumar S., Chandra, Abhijit, Eamkajornsiri, Sutee, Bastawros, Ashraf F.Volume:
7
Year:
2005
Language:
english
Journal:
International Journal of Manufacturing Technology and Management
DOI:
10.1504/ijmtm.2005.007698
File:
PDF, 941 KB
english, 2005