Influence of oxygen/argon reaction gas ratio on optical and electrical characteristics of amorphous IGZO thin films coated by HiPIMS process
Wu, Chia-Hao, Yang, Fu-Chi, Chen, Wei-Chih, Chang, Chi-LungLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.03.089
Date:
April, 2016
File:
PDF, 1.08 MB
english, 2016