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A sub-200 nanometer wide 3D stacking thin-film temperature sensor
Huo, Xiaoye, Wang, Zhenhai, Fu, Mengqi, Xia, Jiye, Xu, ShengyongVolume:
6
Year:
2016
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/c6ra06353e
File:
PDF, 897 KB
english, 2016