Effect of nanoimprint on the elastic modulus of PMMA:...

  • Main
  • 2016 / 3
  • Effect of nanoimprint on the elastic modulus of PMMA:...
Microelectronic Engineering 2016 / 3

Effect of nanoimprint on the elastic modulus of PMMA: Comparison between standard and ultrafast thermal NIL

Pianigiani, Michele, Kirchner, Robert, Sovernigo, Enrico, Pozzato, Alessandro, Tormen, Massimo, Schift, Helmut
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.03.019
Date:
March, 2016
File:
PDF, 1.07 MB
english, 2016
Conversion to is in progress
Conversion to is failed