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Replacement of High-Purity Copper Target by High-Purity Copper Alloy Target in Very Large Scale Integrated Circuit
Gao, Yan, Liu, Xiu, He, Jin Jiang, Zeng, Hao, Xiong, Xiao Dong, Wang, YueVolume:
848
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.848.430
Date:
March, 2016
File:
PDF, 443 KB
english, 2016