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Optical, structural and electric characterization of stacked Hf-based and silicon nitride dielectrics

Khomenkova, L., Normand, P., Gourbilleau, F., Slaoui, A., Bonafos, C.
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.04.036
Date:
April, 2016
File:
PDF, 1021 KB
english, 2016
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