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Sigma-Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control
Giounanlis, Panagiotis, Gorreta, Sergi, Dominguez-Pumar, Manuel, Pons-Nin, Joan, Feely, Orla, Blokhina, ElenaYear:
2016
Language:
english
Journal:
IEEE Transactions on Circuits and Systems II: Express Briefs
DOI:
10.1109/TCSII.2016.2563858
File:
PDF, 1.52 MB
english, 2016