SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Micromachining and Microfabrication Process Technology XVII - Impact of initial surface parameters on the final quality of laser micro-polished surfaces
Chow, Michael, Bordatchev, Evgueni V., Knopf, George K., Maher, Mary Ann, Resnick, Paul J.Volume:
8248
Year:
2012
Language:
english
DOI:
10.1117/12.908137
File:
PDF, 3.10 MB
english, 2012