![](/img/cover-not-exists.png)
An Organic Low-k Film Deposited by Plasma-Enhanced Copolymerization
Kawahara, Jun, Kunimi, Nobutaka, Kinoshita, Keizo, Nakano, Akinori, Komatsu, Masashi, Seino, Yutaka, Kikkawa, TakamaroVolume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2422872
File:
PDF, 335 KB
english, 2007