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Optical investigation of quality improvement of 3C-SiC films after sacrificial oxidation process
Arnaud, G., Aisina, F., Pascual, J., Dezauzier, C., Camassel, J., Bécourt, N., Di Ciocca, L.Volume:
12
Language:
english
Journal:
Materials Science and Technology
DOI:
10.1179/mst.1996.12.1.108
Date:
January, 1996
File:
PDF, 753 KB
english, 1996