Electrical Characterization of Dry and Wet Processed...

ECS Transactions 2015 / 10 Vol. 69; Iss. 5

Electrical Characterization of Dry and Wet Processed Interface Layer in Ge/High-K Devices

Ding, Y. M., Misra, D., Bhuyian, M., Tapily, K., Clark, R. D., Consiglio, S., Wajda, C. S., Leusink, G. J.
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Volume:
69
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06905.0313ecst
Date:
October, 2015
File:
PDF, 6.04 MB
english, 2015
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