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Direct Ion Beam Deposition of Diamond-Like Films From RF Inductively Coupled (IC) Plasma Source: Mechanical, Electrical, and Optical Properties
Druz, B., Zaritskiy, I., Williams, K., Hayes, A., Polyakov, V.I., Kchomich, A.V., Li, Xiodung, Bhushan, BharatVolume:
593
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-593-273
Date:
January, 1999
File:
PDF, 1.51 MB
english, 1999