High-shock silicon accelerometer with a plate spring

International Journal of Precision Engineering and Manufacturing 2016 / 5 Vol. 17; Iss. 5

High-shock silicon accelerometer with a plate spring

Lee, Jae Min, Jang, Chang Uk, Choi, Chang Jun, Kwon, Ki Beom, Han, Jeong Sam, Kwon, Nam Yeol, Ko, Jong Soo
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Volume:
17
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-016-0077-x
Date:
May, 2016
File:
PDF, 731 KB
english, 2016
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