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Fabrication of Nanostructures on Polyethylene Terephthalate Substrate by Interference Lithography and Plasma Etching
Zhu, Mei, Li, Bihan, Choi, W. K.Volume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.7496
Date:
August, 2013
File:
PDF, 8.80 MB
english, 2013