![](/img/cover-not-exists.png)
Effect of fused silica surface wettability on thermal reflow of polymer microlens arrays
Jucius, D., Grigaliūnas, V., Lazauskas, A., Sapeliauskas, E., Abakevičienė, B., Smetona, S., Tamulevičius, S.Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2975-3
Date:
June, 2017
File:
PDF, 1.88 MB
english, 2017