A Survey of Health Indicators and Data-Driven Prognosis in Semiconductor Manufacturing Process
Thieullen, A., Ouladsine, M., Pinaton, J.Volume:
45
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.3182/20120829-3-MX-2028.00246
Date:
January, 2012
File:
PDF, 905 KB
english, 2012