Effect of the thermal annealing on the properties of RF...

Vacuum 2016 / 07 Vol. 129

Effect of the thermal annealing on the properties of RF sputtered Mo-AlNxOy composite thin films

Braga, Thyago Santos, Massi, Marcos, Duarte, Diego Alexandre, Silva Sobrinho, Argemiro Soares, Alves Cardoso, Guilherme Wellington, Pereira, Fabiano Pinto, Barros Machado, João Paulo, Otani, Choyu
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Volume:
129
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2016.04.024
Date:
July, 2016
File:
PDF, 1.79 MB
english, 2016
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