Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma
Saikia, P, Bhuyan, H, Diaz-Droguett, D E, Guzman, F, Mändl, S, Saikia, B K, Favre, M, Maze, J R, Wyndham, EVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/22/225203
Date:
June, 2016
File:
PDF, 1.55 MB
english, 2016