Low-voltage-exposure-enabled hydrogen silsesquioxane...

Nanotechnology 2016 / 06 Vol. 27; Iss. 25

Low-voltage-exposure-enabled hydrogen silsesquioxane bilayer-like process for three-dimensional nanofabrication

Xiang, Quan, Chen, Yiqin, Wang, Yasi, Zheng, Mengjie, Li, Zhiqin, Peng, Wei, Zhou, Yanming, Feng, Bo, Chen, Yifang, Duan, Huigao
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Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/25/254002
Date:
June, 2016
File:
PDF, 1.89 MB
english, 2016
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