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[IEEE 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Montpellier, France (2016.4.18-2016.4.20)] 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Bi-axial highly sensitive ±5g polysilicon based differential capacitive accelerometer
Mohammed, Zakriya, Dushaq, Ghada, Chatterjee, Aveek, Rasras, MahmoudYear:
2016
Language:
english
DOI:
10.1109/EuroSimE.2016.7463335
File:
PDF, 527 KB
english, 2016